Accelerometer with central mass in support

Details Accelerometer with central mass in support Accelerometer with central mass in support

1991-06-21

1992-06-09

Mintel, William

357 25, 357 55, 357 51, 73777, 73517R, 73768, 73517AV, 73517A, 73517B, H01L 2984

Patent

active

051211807

ABSTRACT:
An accelerometer is shown with improved drop resistance for regulating automotive safety air-bag systems and the like. The device comprises a member of silicon semiconducting material having a central seismic mass mounted on a surrounding support by intervening beams, a pair of beams extending from each of four sides of the mass to the support and the mass being otherwise free of connection to the support to permit movement of the mass along an axis perpendicular to the plane of the support in highly sensitive response to acceleration forces along that axis. Each beam extends from a location near an end of one side of the mass so that the two beams extending from each side of the mass are widely spaced relative to each other to oppose rotational or twisting movement of the mass in response to off-axis acceleration forces to prevent damage to the beams during dropping of the accelerometer to the extent possible consistent with providing the desired sensitivity of response. Piezoresistive sensors are accommodated in selected beams to sense strain during movement of the mass to provide an output signal corresponding to acceleration force along the device axis. Stops limit movement of the mass along that axis to further avoid damage to the beams.

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