Accelerometer chip

Details Accelerometer chip Accelerometer chip

1989-05-03

1991-01-29

Myracle, Jerry W.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

357 25, G01P 1508

Patent

active

049877810

ABSTRACT:
A silicon accelerometer chip has a seismic mass (which is a gold sphere) fixed in a cavity formed in a boss supported by beams. Pizeo-resistors forming a Wheatstone bridge are formed in the beams. The cavity is formed by anisotroptically etching the boss, so that the cavity is self-aligned to the sphere.

REFERENCES:
patent: 4050049 (1977-09-01), Youmans
patent: 4430895 (1984-02-01), Colton
patent: 4498342 (1985-02-01), Aske
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4670092 (1987-06-01), Motamedi
patent: 4849695 (1989-07-01), Muller et al.
Roylance, L. M., A Batch-Fabricated Silicon Accelerometer, IEEE Transactions on Silicon Devices, vol. ED-25, No. 12, Dec. '79, pp. 1911-1917.

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