Accelerometer

Details Accelerometer Accelerometer

2008-09-02

2011-11-22

Chapman, Jr., John (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C250S231100

Reexamination Certificate

active

08061204

ABSTRACT:
An accelerometer includes a substrate having a surface and a movable electrode. The movable electrode is mounted on the surface of the substrate and movable along an axis substantially parallel to the surface of the substrate in response to acceleration. A light-permeable region is defined in the movable electrode. A plurality of photosensitive regions and a plurality of non-photosensitive regions are defined in the surface of the substrate. The photosensitive regions and the non-photosensitive regions are spatially separated. The light-permeable region overlies only a portion of one of the non-photosensitive regions when at rest, and the light-permeable region overlies a portion of at least one of the photosensitive regions when the accelerometer is subjected to acceleration, such that the corresponding photosensitive region generates an output current.

REFERENCES:
patent: 3789674 (1974-02-01), Anderson et al.
patent: 3798454 (1974-03-01), Weiss
patent: 5936294 (1999-08-01), Zhang
patent: 6350983 (2002-02-01), Kaldor et al.
patent: 2004/0060355 (2004-04-01), Nemirovsky et al.

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