Accelerometer

Details Accelerometer Accelerometer

2007-02-14

2009-11-17

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

07617729

ABSTRACT:
An accelerometer is fabricated as a MEMS device and includes an array of capacitive electrode plates mechanically coupled to a common proof mass.The proof mass is constrained to move or vibrate in the plane parallel to the first array of plates. The capacitance between the first array of plates is measured with respect to additional arrays of capacitive plates inter-digitated in a comb like pattern.

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