Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1982-06-24
1984-11-20
Gill, James J.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
73517B, G01P 15125
Patent
active
044831943
ABSTRACT:
Integrated accelerometers comprising a flap (2) fixed to a carrier (1) by two attachment means (3) which are disposed symmetrically and in line with one side of the flap. An electrode (5) deposited on a plate (4) permits acceleration to be measured by measuring the corresponding variation in capacitance between the flap (2) and the electrode (5).
REFERENCES:
patent: 3209601 (1965-10-01), Stiles
patent: 3691850 (1972-09-01), Slater et al.
patent: 3877313 (1975-04-01), Ferriss
patent: 4244225 (1981-01-01), Greenwood
patent: 4342227 (1982-08-01), Petersen et al.
patent: 4345474 (1982-08-01), Deval
"A Monolithic Capacitive Pressure Sensor with Pulse-Period Output", IEEE Transactions on Electron Devices, vol. ED-27, No. 5, May 1980.
"An Electrochemical P-N Junction Etch-Stop for the Formation of Silicon Microstructure" Which Appeared in IEEE Electron Device Letters, vol. EDL-9, No. 2, Feb. 1981.
"Silicon Cantilever Beam Accelerometer Utilizing a PI-FET Capacitive Transducer", IEEE Trans. on Electron Devices, vol. ED-26, No. 11, Nov. 1979.
"A Batch-Fabricated Silicon Accelerometer", IEEE Trans. on Electron Devices, vol. ED-26, No. 12, Dec. 1979.
"Micromechanical Accelerometer Integrated with MOS Detection Circuitry" by Petersen et al., from International Electron Devices Meeting Technical Digest, Dec. 1980.
"A Miniature Integrated Circuit Accelerometer" by Roylance et al. IEEE International Solid-State Circuits Conference Feb. 1978.
Centre Electronique Horloger S.A.
Gill James J.
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