Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1994-06-03
1997-01-07
Oda, Christine K.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351432, 200 6145R, G01P 1508
Patent
active
055919103
ABSTRACT:
A plating of an inertial mass (207) in a micromechanical accelerometer (200) to increase sensitivity to smaller accelerations. The inertial mass (207) may be on a plate (206) suspended by hinges (208) over a sensing electrode (212) to measure displacement of the inertial mass (207) relative to the sensing electrode (212).
REFERENCES:
patent: 4736629 (1988-04-01), Cole
patent: 5195371 (1993-03-01), Grieff
patent: 5209117 (1993-05-01), Bennett
Brady III W. James
Donaldson Richard L.
Hoel Carlton H.
Oda Christine K.
Texas Instruments Incorporated
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