Accelerometer

Details Accelerometer Accelerometer

1991-07-03

1993-08-10

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Temperature compensator

73493, 73517R, G01P 102

Patent

active

052338738

ABSTRACT:
An accelerometer device particularly adapted for use in automotive safety air bag applications comprises an electrically insulating substrate having electrically conducting circuit paths, signal conditioning circuit components, and an accelerometer unit mounted thereon, the substrate being fixed in position on three pins within a housing. The accelerometer comprises a silicon mass movable in a silicon body relative to an integral silicon support to provide strain in the silicon body in response to acceleration and has piezoresistive sensors formed in the silicon body to be responsive to that strain to provide an electrical signal corresponding to the acceleration. A member having a selected configuration and thermal response characteristics suspends the accelerometer unit on the substrate with the piezoresistive sensors connected to the circuit paths with the piezoresistive sensors isolated from strain in the silicon body due to differences in thermal expansion between the silicon body, and the substrate during temperature changes likely to be encountered.

REFERENCES:
patent: 4164263 (1979-08-01), Heintz et al.
patent: 4825696 (1989-05-01), Seipler
patent: 4829822 (1989-05-01), Imai et al.
patent: 4926689 (1990-05-01), Hanson
patent: 5058430 (1991-10-01), Aske
patent: 5150616 (1992-09-01), Kondo et al.

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