Accelerometer

Details Accelerometer Accelerometer

1987-03-13

1989-06-06

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73497, 338 3, G01P 1512

Patent

active

048360252

ABSTRACT:
First and second piezo reistances are disposed on a flexible member which supports a mass member on a semiconductor base and are arranged to be responsive to the amount of flexure thereof. The flexible member has a predetermined uniform thickness. Second and third piezo resistances are arranged on a separate compensation member which projects from the base. This member is subject to essentially no flexure and has exactly the same uniform thickness as the flexible one. The four piezo resistances are connected to define a bridge circuit the output of which is indicative of the force which induces the flexure of the flexible member.

REFERENCES:
patent: 4522072 (1985-06-01), Sulouff et al.
patent: 4553436 (1985-11-01), Hansson
L. M. Roylance et al., "A Batch-Fabricated Silicon Accelerometer," IEEE Transactions on Electron Devices, vol. ED-26, No. 12 (Dec. 1979), pp. 1911-1917.

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