Accelerometer

Details Accelerometer Accelerometer

1988-07-21

1990-05-01

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73517B, G01P 1508

Patent

active

049208012

ABSTRACT:
An accelerometer capable of sensing acceleration in three orthogonal directions while being formed in a single silicon wafer comprises three cantilever beams (2) etched from the wafer, each having a mass (3) asymmetric to the neutral plane (A) of the beam, and formed by etching away the beam (2) on one face only of the wafer. The beams are arranged at 120.degree. to each other so that their sensing axes (S) are orthogonal or approximately so. Deflection of the beams is measured by piezoelectric, electrostatic or electrodynamic effect and force feedback is preferably employed, again using one of these effects.

REFERENCES:
patent: 4342227 (1982-08-01), Peterson et al.
patent: 4679434 (1987-07-01), Stewart
patent: 4736629 (1988-04-01), Cole
patent: 4803883 (1989-02-01), Shutt
patent: 4809552 (1989-03-01), Johnson
"A Miniature Integrated Circuit Accelerometer", L. M. Roylance et al., IEEE Int'l Solid-State Ckts. Conf., San Francisco, Calif., 15-17 Feb. 1978.

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