Acceleration sensor with temperature resistor elements

Details Acceleration sensor with temperature resistor elements Acceleration sensor with temperature resistor elements

1998-02-09

1999-08-31

Oda, Christine K.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351405, G01P 1512

Patent

active

059456019

ABSTRACT:
A very small and economical acceleration sensor which can detect acting acceleration with high sensitivity and high accuracy by precisely processing a semiconductor substrate and the like by using the photoengraving technique in a semiconductor manufacturing process to accurately form the elements themselves such as a sensor case, a cavity, a heater, a temperature-sensing resistor element, and a heat-type temperature-sensing resistor element, and the relative placement of each element. One embodiment of the acceleration sensor can detect acceleration acting from any of the three-dimensional directions.

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