Acceleration sensor with redundant contact holes

Details Acceleration sensor with redundant contact holes Acceleration sensor with redundant contact holes

2006-01-05

2008-01-29

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514340

Reexamination Certificate

active

07322241

ABSTRACT:
An acceleration sensor includes a mass and a supporting member linked by a flexible beam. A strain detector having low-resistance areas at both ends is formed near a boundary between the beam and the mass or between the beam and the supporting member. A dielectric film formed on the supporting member and the beam has multiple contact holes disposed over each low-resistance area. Wiring formed on the dielectric film is connected to the low-resistance areas through the contact holes. The provision of multiple contact holes for each low-resistance area extends the life of the acceleration sensor by preventing sensor failure due to the separation or other failure of any single contact.

REFERENCES:
patent: 5998816 (1999-12-01), Nakaki et al.
patent: 6763719 (2004-07-01), Hatano et al.
patent: 6931928 (2005-08-01), Hashimoto et al.
patent: 7010976 (2006-03-01), Ozawa et al.
patent: 7111514 (2006-09-01), Hatano et al.
patent: 2004-198243 (2004-07-01), None

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