Measuring and testing – Instrument proving or calibrating – Volume of flow – speed of flow – volume rate of flow – or mass...
Patent
1992-07-16
1995-01-03
Noland, Tom
Measuring and testing
Instrument proving or calibrating
Volume of flow, speed of flow, volume rate of flow, or mass...
73517AV, G01P 1505, G01P 2100
Patent
active
053775236
ABSTRACT:
This invention relates to an acceleration sensor device suitable for self-checking while a vehicle is being driven and a self-checking circuit therefor. An acceleration sensor device for self-checking while driving is comprised of a planar vibrator having a piezoelectric area and a non-piezoelectric area and a plurality of first electrodes provided on an upper face of the piezoelectric area of the planar vibrator. At least one second electrode is provided on an upper face of the non-piezoelectric area of the planar vibrator, and a third electrode is provided on the lower face of the planar vibrator. Inputs to the self-checking circuits provide an output that represents the operating state of the acceleration sensor.
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Gohkura Akira
Mukasa Yoshinao
Ohta Fumio
Tanaka Nobuo
Mitsubishi Petrochemical Co. Ltd.
Noland Tom
O'Reilly David
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