Acceleration sensor having resonators with reduced height

Details Acceleration sensor having resonators with reduced height Acceleration sensor having resonators with reduced height

2007-03-27

2007-03-27

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514290

Reexamination Certificate

active

10540238

ABSTRACT:
A compact, highly sensitive acceleration sensor that is not affected by factors other than acceleration, such as a change in temperature, includes a bimorph acceleration-sensor element including first and second resonators and attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end or both longitudinal ends of the acceleration-sensor element is/are fixed such that the resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. The acceleration-sensor element is bendable about a central bending plane N1in response to the acceleration, the central bending plane N1being positioned at a central portion of the base plate with respect to the application direction of acceleration. Electrodes are disposed on main surfaces of the resonators, the main surfaces being substantially perpendicular to the application direction of acceleration. The height H1of the resonators in a direction that is substantially perpendicular to the application direction of acceleration is smaller than the height H2of the base plate in the direction that is substantially perpendicular to the application direction of acceleration.

REFERENCES:
patent: 5515725 (1996-05-01), Tabota et al.
patent: 6588276 (2003-07-01), Yamashita
patent: 6744181 (2004-06-01), Ogiura et al.
patent: 6766690 (2004-07-01), Tabota
patent: 6786095 (2004-09-01), Tabota
patent: 2002/0069702 (2002-06-01), Tabota
patent: 2006/0081048 (2006-04-01), Mikado et al.
patent: 06-273439 (1994-09-01), None
patent: 2780594 (1998-05-01), None
patent: 2002-107372 (2002-04-01), None

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