Acceleration sensor formed on surface of semiconductor...

Details Acceleration sensor formed on surface of semiconductor... Acceleration sensor formed on surface of semiconductor...

2005-05-17

2005-05-17

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S493000

Reexamination Certificate

active

06892577

ABSTRACT:
In a movable space, a boundary (CN1) between a ceiling surface and a wall surface of a cap (CA) has a curved plane. When stress is exerted on the cap (CA), this stress is dispersed accordingly around the boundary (CN1) having a high probability of generation of a crack. Therefore, generation of a crack in the cap (CN) is unlikely.

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