Acceleration sensor device

Details Acceleration sensor device Acceleration sensor device

1996-11-18

1998-06-30

Saadat, Mahshid D.

Active solid-state devices (e.g., transistors, solid-state diode

Housing or package

Multiple housings

257417, 257693, 257697, 438 51, 438117, H01L 2302, H01L 2348

Patent

active

057738815

ABSTRACT:
An impact load effected on the single body of an acceleration sensor device is absorbed with a relatively simple construction, thereby protecting a semiconductor sensor element provided in the sensor. The acceleration sensor device comprises a semiconductor sensor element 2 which can sense an acceleration in a direction perpendicular to its principal plane, a base plate 3 which supports the sensor element 2, a package 11 which supports the base plate 3 and encloses the base plate 3 and the sensor element 2, a frame 12 which has a plurality of leg sections 12d protruding from a bottom plane of the package 11 and is fixed on the package 11, and a cap-shaped resin cover 13 which has a roof section 13a opposite to an upper surface of the package 11 or the frame 12 and covers the package 11 from above as fixed on the package 11, and a side wall section 13b of the cover 13 extends at least to a position corresponding to a place where the sensor element 2 is arranged.

REFERENCES:
patent: 5157472 (1992-10-01), Takemura
patent: 5231879 (1993-08-01), Yamamoto
patent: 5408112 (1995-04-01), Tai et al.
patent: 5587608 (1996-12-01), Meng
patent: 5633461 (1997-05-01), Kakizaki et al.

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