Acceleration sensor device

Details Acceleration sensor device Acceleration sensor device

1996-11-26

1999-02-02

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73493, 7351436, G01P 1512

Patent

active

058668187

ABSTRACT:
An acceleration sensor element constitutes a piezoresistance type acceleration sensor in which an acceleration sensor chip including a cantilever structure of mass and beam parts and a piezoresistor formed on the beam part is mounted on a main lead which is slanted for positioning the piezoresistor and the center of gravity of the mass part substantially on the same horizontal plane in a mounted state of the sensor. The element thereby improves the reliability and assures such property as other-axis sensitivity of the sensor at the time of shipment.

REFERENCES:
patent: 4399692 (1983-08-01), Hulsing, II et al.
patent: 5239870 (1993-08-01), Kaneko
patent: 5490421 (1996-02-01), Ueyanagi
patent: 5528935 (1996-06-01), Welch et al.

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