Acceleration sensor chip

Details Acceleration sensor chip Acceleration sensor chip

2007-07-17

2007-07-17

Kwok, Helen (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514290, C073S514380

Reexamination Certificate

active

11362176

ABSTRACT:
An acceleration sensor chip has a frame portion having a frame body portion and protruding portions. The acceleration sensor chip also includes a mobile structure having a central weight portion supported movably by four beam portions. The mobile structure also has four rectangular parallelepiped-form protruding weight portions The acceleration sensor chip also includes a plurality of stoppers extending above the protruding weight portions.

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patent: 7010976 (2006-03-01), Ozawa et al.
patent: 7019231 (2006-03-01), Ishikawa et al.
patent: 2004/0261529 (2004-12-01), Yoshida et al.
patent: 2002-296293 (2002-10-01), None
patent: 2004-109114 (2004-04-01), None
patent: 2004-198243 (2004-07-01), None

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