Acceleration sensor and triaxial acceleration sensor

Details Acceleration sensor and triaxial acceleration sensor Acceleration sensor and triaxial acceleration sensor

1998-09-28

2000-11-21

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73862041, 73862043, G01P 1509, G01L 100, G01L 300

Patent

active

06148671&

ABSTRACT:
An acceleration sensor capable of restraining a reduction in output thereof due to an electrostatic capacity between acceleration detecting electrodes and output electrodes. A low-dielectric layer is arranged between a connection line and a piezoelectric ceramic substrate. Another low-dielectric layer is arranged between additional connection lines and output electrodes, and the substrate. The low-dielectric layers are formed of a material substantially reduced in relative dielectric constant as compared with the substrate. The low-dielectric layers reduce an electrostatic capacity generated between wiring patterns and the output electrodes, and a counter electrode pattern, to thereby reduce the amount of spontaneous polarization charges accumulated in the electrostatic capacity.

REFERENCES:
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patent: 5128581 (1992-07-01), Nakayama et al.
patent: 5365799 (1994-11-01), Okada
patent: 5417115 (1995-05-01), Burns
patent: 5571972 (1996-11-01), Okada
patent: 5616844 (1997-04-01), Suzuki et al.
patent: 5646346 (1997-07-01), Okada
patent: 5763783 (1998-06-01), Asada

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