Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1996-10-08
2000-08-08
Chapman, John E.
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
310331, G01P 1509
Patent
active
060984600
ABSTRACT:
A small accelaration sensor which is highly sensitive over a large frequency region and which varies little in characteristics such as sensitivity. A piezoelectric element is formed by connecting two main faces of retangular LiNbO.sub.3 piezoelectric substrates, in which the polarization axes are directed oppositely. Supporters comprising LiNbO.sub.3 directly connected to one end of the piezoelectric element. Eletrodes of chromium-gold being 0.2 .mu.m are thick are successively connected to the two main faces of the piozoelectric element and to the supporters, thus to produce a cantilever structure bimorph electromechanical transducer.
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Kawasaki Osamu
Ogura Tetsuyoshi
Otsuchi Tetsuro
Sugimoto Masato
Tomita Yoshihiro
Chapman John E.
Matsushita Electric - Industrial Co., Ltd.
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