Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2008-05-16
2011-11-01
Allen, Andre (Department: 2855)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
C073S514340, C257S043000, C257S417000, C029S837000
Reexamination Certificate
active
08047076
ABSTRACT:
Provided is an acceleration sensor that has high detection sensitivity and that can enhance production efficiency. The acceleration sensor has: a ceramic substrate made of Al2O3; a ferroelectric layer formed in a predetermined area on the ceramic substrate by screen printing, the ferroelectric layer being made of BaTiO3; a proof mass disposed so as to face the ferroelectric layer, the proof mass being formed at a predetermined distance d from the ferroelectric layer; and a first electrode and a second electrode that are formed on that side of the proof mass which faces the ferroelectric layer, so as to be fixed thereto. The first electrode and the second electrode are each formed in the shape of comb teeth, and comb tooth portions and thereof are arranged in an alternating manner.
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Tajiri Hiroyuki
Yoshikawa Yasuhiro
Allen Andre
Fish & Richardson P.C.
Rohm & Co., Ltd.
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