Acceleration sensor and method for producing the same

Details Acceleration sensor and method for producing the same Acceleration sensor and method for producing the same

1997-01-13

2000-08-29

Budd, Mark O.

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

310344, 310354, 310353, H01L 4108

Patent

active

061113387

ABSTRACT:
An acceleration sensor includes: a piezoelectric vibrator including a piezoelectric element having a first principal surface and a second principal surface opposed each other, a first and a second electrode formed on the first and the second principal surface, and conductive protrusions made of a metal material or a ceramic material and formed by a thermal spraying process; and a holding body for holding the piezoelectric vibrator via the conductive protrusions.

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