Acceleration sensor and method for manufacturing thereof

Details Acceleration sensor and method for manufacturing thereof Acceleration sensor and method for manufacturing thereof

1997-08-04

1999-11-23

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

200 6145R, G01P 1500

Patent

active

059879882

ABSTRACT:
An acceleration sensor includes a first substrate, a second substrate and a third substrate. The second substrate has a through-hole, a first contact formed on an inner surface of the through-hole, and a first bonding pad connected to the first contact. An electrically conductive ball is accommodated in the through-hole. The third substrate has a recess, a second contact formed in the recess contacting the bottom of the electrically conductive ball, and a second bonding pad connected to the second contact.

REFERENCES:
patent: 3733447 (1973-05-01), Schneider, Jr.
patent: 4001185 (1977-01-01), Mitsui et al.
patent: 4031848 (1977-06-01), Killen
patent: 4135067 (1979-01-01), Bitko
patent: 4337402 (1982-06-01), Nowakowski
patent: 4927783 (1990-05-01), Arai et al.
patent: 4977105 (1990-12-01), Okamoto et al.
patent: 5410113 (1995-04-01), Mielke

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