Acceleration sensor and method for manufacturing same

Details Acceleration sensor and method for manufacturing same Acceleration sensor and method for manufacturing same

1994-03-08

1995-09-05

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 102

Patent

active

054470676

ABSTRACT:
An acceleration sensor has a proof mass attached by resilient elements, in the form of micromechanical components, in a monocrystalline silicon layer of an SOI (silicon-on-insulator) substrate, the insulator layer of the substrate being removed under the structure which is susceptible to acceleration, in order to enable free mobility of the micromechanical components. Piezoresistors are provided for detecting movement of the proof mass, the piezoresistors supplying electrical signals to an evaluation circuit.

REFERENCES:
patent: 4893509 (1990-01-01), MacIver et al.
patent: 5025346 (1991-06-01), Tang et al.
patent: 5233873 (1993-08-01), Mozogowiec et al.
patent: 5357803 (1994-10-01), Lane
"Silicon Micromechanics: Sensors and Actuators on a Chip", Howe et al. IEEE Spectrum, Jul. 1990, pp. 29-35.

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