Acceleration sensor and method for manufacturing an...

Details Acceleration sensor and method for manufacturing an... Acceleration sensor and method for manufacturing an...

2005-04-26

2005-04-26

Lefkowitz, Edward (Department: 2855)

Measuring and testing

Fluid pressure gauge

Electrical

C073S715000, C073S727000

Reexamination Certificate

active

06883381

ABSTRACT:
An acceleration sensor includes a deflectable pressure measuring diaphragm and a counter-structure, which is deflectable as against the pressure measuring diaphragm. The acceleration sensor includes a detection means for detecting a deflection of the pressure measuring diaphragm as against the counter-structure. Further, a test mass is connected to the pressure measuring diaphragm or the counter-structure in order to be deflected from an idle position depending on an acceleration applied. The deflection of the test mass results in a change of the distance between the pressure measuring diaphragm and the counter-structure, which is detectable by the detection means.

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