Acceleration sensor and measurement method

Details Acceleration sensor and measurement method Acceleration sensor and measurement method

1995-09-11

1997-04-08

Oda, Christine K.

Measuring and testing

Instrument proving or calibrating

Speed, velocity, or acceleration

7351432, G01P 1508

Patent

active

056189893

ABSTRACT:
An acceleration sensor has a seismic mass having movable electrodes. The movable electrodes are designed as differential capacitors between two fixed electrodes. Also provided are additional electrodes which are arranged opposite movable electrodes or opposite bending elements on which the seismic mass is suspended. Electrical voltages which are evaluated by the evaluation circuit as acceleration can be applied to the additional electrodes.

REFERENCES:
patent: 5337606 (1994-08-01), Bennett
patent: 5345824 (1994-09-01), Sherman
patent: 5351519 (1994-10-01), Kress
patent: 5465604 (1995-11-01), Sherman
patent: 5511420 (1996-04-01), Zhao

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