Acceleration sensor and manufacturing method thereof

Details Acceleration sensor and manufacturing method thereof Acceleration sensor and manufacturing method thereof

2006-03-14

2006-03-14

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Angular rate using gyroscopic or coriolis effect

C073S514380, C073S514330, C073S514320, C438S053000

Reexamination Certificate

active

07010976

ABSTRACT:
There is provided a compact, high-sensitivity acceleration sensor. The acceleration sensor includes a weight8, a pedestal9arranged around the periphery of the weight8, a support frame3formed to have a width narrower than the width of the pedestal9all around its perimeter, a mass2attached to the weight8to retain the weight8inside the support frame3, beams4connecting the support frame3and the mass2and overlapping the pedestal9near their ends on the side of the support frame3, and a peripheral interlayer12arranged between the support frame3and the pedestal9to create a predetermined clearance between the pedestal9and the parts of the beams4that overlap the pedestal9.

REFERENCES:
patent: 6293149 (2001-09-01), Yoshida et al.
patent: 6772632 (2004-08-01), Okada
patent: 10048243 (1998-02-01), None

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