Measuring and testing – Speed – velocity – or acceleration – With response to a nonspeed condition
Reexamination Certificate
2004-02-10
2008-09-30
Williams, Hezron E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
With response to a nonspeed condition
C073S493000, C073S514010, C073S488000
Reexamination Certificate
active
07428841
ABSTRACT:
In an acceleration sensor detecting inclined displacement of a predetermined article from a basic position, the acceleration sensor (10) includes a sensor chip having a detection plane including one detection axis or two crossing detection axes detecting the inclined displacement. An axis orthogonal to the detection plane of the sensor chip is disposed in parallel with a standard plane of the article in the basic position. Then, the sensor chip obtains an output signal according to the inclined displacement of the standard plane.
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Harada Muneo
Hashimoto Hiroyuki
Ikeuchi Naoki
Finnegan Henderson Farabow Garret & Dunner LLP
Gissel Gunnar J
Tokyo Electron Limited
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