Acceleration sensor and a method of producing same

Details Acceleration sensor and a method of producing same Acceleration sensor and a method of producing same

1997-12-17

2000-03-28

Moller, Richard A.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 15125

Patent

active

06041653&

ABSTRACT:
An acceleration sensor including: a fixed substrate; a fixed electrode mounted on the fixed substrate; a movable body, supported by the fixed substrate and displaced in response to an applied acceleration; a movable electrode which is arranged in the movable body in such a manner that the movable electrode faces the fixed electrode to form, together with the fixed electrode, a capacitor; wherein the movable electrode is mounted between grooves formed in the movable body. The acceleration sensor features improved mechanical strength, compact design and improved sensing accuracy while permitting the manufacturing process to be simplified.

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patent: 5503017 (1996-04-01), Mizukoshi
patent: 5561248 (1996-10-01), Negoro
patent: 5618989 (1997-04-01), Marek
patent: 5719336 (1998-02-01), Ando et al.

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