Acceleration sensor

Details Acceleration sensor Acceleration sensor

2005-10-18

2005-10-18

Kwok, Helen C. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514290

Reexamination Certificate

active

06955086

ABSTRACT:
An acceleration sensor includes first and second fixed electrodes on a substrate, and a movable electrode located above the first and second fixed electrodes, with respect to the substrate, and facing them. The movable electrode is elastically supported on the substrate by a first elastic supporting body and is movable. A mass, which is elastically supported on the substrate by a second elastic supporting body, moves in response to an acceleration in a direction perpendicular to the substrate. A linking portion links the movable electrode and the mass at a position spaced from an axis of movement of the movable electrode by a distance. Acceleration is measured based on changes in a first capacitance between the first fixed electrode and the movable electrode and a second capacitance between the second fixed electrode and the movable electrode. Thus, a highly impact resistant and highly reliable acceleration sensor is obtained.

REFERENCES:
patent: 4736629 (1988-04-01), Cole
patent: 5126812 (1992-06-01), Greiff
patent: 5905203 (1999-05-01), Glach et al.
patent: 6763716 (2004-07-01), Nagahara et al.
patent: 0 773 443 (1997-05-01), None
patent: 05-133976 (1993-05-01), None
patent: 07-005193 (1995-01-01), None
patent: WO 91/14285 (1991-09-01), None

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