Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Reexamination Certificate
2005-05-17
2005-05-17
Kwok, Helen (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
Reexamination Certificate
active
06892578
ABSTRACT:
An acceleration sensor in which a regulation plate is fixed with adhesive onto a support frame of a sensor chip of the sensor to limit the movement of a mass portion of the sensor chip within a predetermined gap range. In the acceleration sensor, the adhesion area of the adhesive can be controlled to a predetermined value to prevent a variation of the sensitivity due to the variation of the adhesion area. The sensor chip comprises the mass portion, the frame surrounding the mass portion and having on an upper surface of the frame a plurality of the recesses to fill adhesive into, elastic support arms bridging the mass portion and the frame, and strain gauges formed on the elastic support arms. The regulation plate is fixed with paste onto the frame with the predetermined gap with an upper surface of the mass portion. The paste contains hard plastic balls, of a diameter larger than the predetermined gap, mixed with adhesive. The adhesive is preferably of silicon-rubber resin.
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Furuichi Shinji
Saitoh Masakatsu
Satoh Takashi
Hitachi Metals Ltd.
Kwok Helen
Sughrue & Mion, PLLC
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