Acceleration sensor

Details Acceleration sensor Acceleration sensor

1995-05-26

1996-08-06

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351433, 7351434, G01P 1500

Patent

active

055422977

ABSTRACT:
In the sensor including a frame member provided with a central opening portion, a pair of beam members extending from adjacent corner portions of the frame member toward a center of the opening portion, and the beam members have vibrating-end portions, i.e., inner end portions, connected with each other through a weight portion. Each of the beam members is provided with a concave portion in cross section. A piezo-resistance device is formed on each of the beam members, respectively. The beam members are improved in mechanical strength without a corresponding increase in a thickness of each of the beam members, while the piezo-resistance devices formed on the beam members are improved in sensitivity to vibrations.

REFERENCES:
patent: 2258613 (1941-10-01), Kannenstine et al.
patent: 4969359 (1990-11-01), Mikkor
patent: 5081867 (1992-01-01), Yamada
patent: 5228341 (1993-07-01), Tsuchitani et al.

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