Acceleration sensor

Details Acceleration sensor Acceleration sensor

1995-06-06

1997-05-06

Chapman, John E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351435, 73862626, G01P 15125

Patent

active

056273177

ABSTRACT:
A sensor in which the structure of a movable element is produced from an upper silicon layer of a laminated substrate. Individual regions of the upper layer are insulated from one another by insulation trenches which are bridged by conductor tracks coupled to at least one electrode on the movable element and at least one stationary electrode on the upper layer proximate to the at least one electrode on the movable element.

REFERENCES:
patent: 5233213 (1993-08-01), Marek
patent: 5417111 (1995-05-01), Sherman et al.
patent: 5447068 (1995-09-01), Tang
patent: 5461916 (1995-10-01), Fujii et al.

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