Acceleration sensor

Details Acceleration sensor Acceleration sensor

1993-10-05

1995-10-31

Chilcot, Jr., Richard E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 15125

Patent

active

054619173

ABSTRACT:
An acceleration sensor and a method of making an acceleration sensor is described in which a movable sensor element is located in a hollow space formed in the middle of three silicon plates. During production, air can be removed from the hollow space through a hole in one of the two outer plates. The hole is then closed by an additional plate, which allows for a defined pressure to be set in the hollow space.

REFERENCES:
patent: 4901570 (1990-02-01), Chang et al.
patent: 4967597 (1990-11-01), Yamada et al.
patent: 5090254 (1992-02-01), Guckel et al.
patent: 5181156 (1993-01-01), Gutteridge et al.
patent: 5228341 (1993-07-01), Tsuchitani et al.

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