Acceleration sensor

Details Acceleration sensor Acceleration sensor

1993-09-01

1995-05-09

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

32420713, G01P 1508, G01B 724

Patent

active

054129885

ABSTRACT:
An acceleration sensor includes a silicon substrate with a micromechanical bender bar constituting a testing mass having one end mounted the silicon substrate and a free end opposite the one end. A ferromagnetic core is mounted on the free end of the micromechanical bender bar. An excitation coil is supported on the ferromagnetic core for furnishing an inhomogeneous magnetic field when supplied with an alternating current. A cooled superconducting quantum interference detector (SQUID) arrangement is mounted adjacent the ferromagnetic core for detecting changes in the inhomogeneous magnetic field produced by the excitation coil and produces a useful signal in dependence of changes in the inhomogeneous magnetic field.

REFERENCES:
patent: 4841772 (1989-06-01), Paik
patent: 4912408 (1990-03-01), Sawada
patent: 5166612 (1992-11-01), Murdock
patent: 5224380 (1993-07-01), Paik
John Clarke, "Squid Concepts and Systems", Superconducting Electronics, Springer-Verlag Berlin, NATO ASI Series, vol. 59, 1989, pp. 87-148.
C. Jewell, "The Development of Cryocoolers for Space Applications", Preparing for the Future, European Space Agency, vol. 1, No. 2, Dec. 1991, pp. 2-4.

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