Acceleration sensor

Details Acceleration sensor Acceleration sensor

1989-04-11

1990-11-06

Chapman, John

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

G01P 1508

Patent

active

049675974

ABSTRACT:
When an acceleration sensor is used, it is attached to a measured object to detect an acceleration applied to the object. The acceleration sensor includes a package having at least one chamber. A sensor element is disposed in the chamber and has a portion which vibrates in response to the acceleration. Damping liquid is sealed within the package and has a quantity which allows the sensor element to be submerged in the damping liquid and which allows a predetermined quantity of gas to remain in the package. The gas absorbs a thermally-induced volume change of the damping liquid. In the absence of the acceleration, a gas bubble is prevented from separating from the gas. In addition, the gas bubble is prevented from staying in the chamber.

REFERENCES:
patent: 3363470 (1968-01-01), Yavne
patent: 3557628 (1971-01-01), Tsukada
patent: 3884085 (1975-05-01), Beckman et al.
patent: 4164263 (1979-08-01), Heintz et al.
patent: 4275586 (1981-06-01), Gast et al.
patent: 4829822 (1989-05-01), Imai et al.
"A Batch-Fabricated Silicon Accelerometer" by L. M. Roylance et al; IEEE Transactions on Electron Devices, vol. ED-26, No. 12, Dec. 1979, pp. 1911-1917.

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