Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element
Patent
1993-07-08
1996-04-30
Chilcot, Richard
Measuring and testing
Speed, velocity, or acceleration
Acceleration determination utilizing inertial element
7351401, 7351423, 7351435, G01P 1508
Patent
active
055114210
ABSTRACT:
An acceleration detecting method and an acceleration sensor are disclosed. An inverted potential distribution structure of a metal-insulator-semiconductor type is formed on a semiconductor substrate. The deflection of the weight fixed above the semiconductor substrate with a predetermined space therebetween is detected by the output of the inverted potential distribution structure of a metal-insulator-semiconductor type. The inverted potential distribution structure of a metal-insulator-semiconductor type is turned on when the weight or the electrode on the surface thereof comes close to or comes into contact with the insulation film or the electrode on the semiconductor substrate. The capacitance of the inverted potential distribution structure of a metal-insulator-semiconductor type changes with the deflection of the weight.
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Chilcot Richard
McCall Eric S.
Rohm & Co., Ltd.
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