Acceleration sensor

Details Acceleration sensor Acceleration sensor

1995-08-04

1996-11-12

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

3612833, G01P 15125

Patent

active

055742220

ABSTRACT:
In an acceleration sensor having a multiplicity of movable electrodes, a first group of fixed electrodes is arranged on one side of the movable electrodes and a second group of fixed electrodes is arranged on the other side of the movable electrodes. The fixed electrodes of the first group are suspended from a connecting beam and are connected in parallel electrically by the latter. The fixed electrodes of the second group are anchored individually on the substrate and are connected in parallel electrically by means of a connecting conductor track.

REFERENCES:
patent: 4177421 (1979-12-01), Thornburg
patent: 5025346 (1991-06-01), Tang et al.
patent: 5428259 (1995-06-01), Suzuki
patent: 5447068 (1995-09-01), Tang

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