Acceleration sensor

Details Acceleration sensor Acceleration sensor

1997-09-29

1999-03-02

Williams, Hezron

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

7351432, G01P 1500

Patent

active

058774211

ABSTRACT:
An acceleration sensor has a mass part movably attached over a substrate with pairs of electrodes arranged relative to the mass part so that one electrode of each pair is under the mass part and the other electrode of that pair is arranged above the mass part. The electrodes are attached immovably to the substrate. Controllable electrical voltages can be applied such via an electronic drive circuit to the electrically conductively doped mass part and to these electrodes so that excursions of the mass part can be electrostatically compensated and, at the same time, the magnitude of inertial forces acting on the mass part, and thus the magnitude of accelerations, can be measured.

REFERENCES:
patent: 5337606 (1994-08-01), Bennett et al.
patent: 5431051 (1995-07-01), Biebl et al.
patent: 5497660 (1996-03-01), Warren
patent: 5604313 (1997-02-01), Cahill et al.

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