Acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Structural installation or mounting means

Reexamination Certificate

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Details

C073S514330, C073S514380

Reexamination Certificate

active

08042392

ABSTRACT:
An acceleration sensor has a semiconductor acceleration sensor chip and a case. The semiconductor acceleration sensor chip has a fixed portion, a plummet portion surrounding the fixed portion without contacting the fixed portion, and a beam portion connecting the fixed portion and the plummet portion, the thickness of the beam portion being thinner than the thickness of the fixed portion. The case has a cavity housing the semiconductor acceleration sensor chip, and a projection portion formed on the bottom face of the cavity, the bottom face of the fixed portion being fixed to the top face of the projection portion.

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patent: 5783750 (1998-07-01), Otani
patent: 5828116 (1998-10-01), Ao
patent: 6979873 (2005-12-01), Fujii
patent: 7296471 (2007-11-01), Ono et al.
patent: 7568390 (2009-08-01), Shizuno
patent: 3-202778 (1991-09-01), None
patent: 9-061448 (1997-03-01), None
patent: 10-123166 (1998-05-01), None

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