Acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Acceleration determination utilizing inertial element

Reexamination Certificate

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Details

C073S514320

Reexamination Certificate

active

07730783

ABSTRACT:
An acceleration sensor includes a seismic mass which is suspended on springs above a substrate and is deflectable in a direction perpendicular to a surface of the substrate. In order to reduce deflections of the seismic mass along the surface of the substrate because of interference accelerations, which lead to a falsification of the measurements of the deflection of the seismic mass perpendicular to the surface of the substrate, the springs include two bending bars which are interconnected via crosspieces.

REFERENCES:
patent: 5415043 (1995-05-01), Zabler et al.
patent: 6923062 (2005-08-01), Franz et al.
patent: 2002/0011112 (2002-01-01), Kipp et al.
patent: 2004/0025589 (2004-02-01), Kurle et al.
patent: 2004/0129077 (2004-07-01), Franz et al.
patent: 2007/0126069 (2007-06-01), Muchow et al.

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