Acceleration sensor

Details Acceleration sensor Acceleration sensor

2007-08-10

2010-12-07

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

07845229

ABSTRACT:
The acceleration sensor according to the present invention includes a circuit chip having a prescribed circuit built into a front surface thereof; a sensor chip bonded to the front surface of the circuit chip; and a resin package for sealing the circuit chip and the sensor chip, while the sensor chip includes: a membrane arranged to oppose to the front surface of the circuit chip and having a plurality of openings; a piezoresistor formed on a surface of the membrane opposed to the circuit chip; a support section provided on a side opposite to the circuit chip with respect to the membrane and supporting a peripheral edge portion of the membrane; and a weight section provided on the side opposite to the circuit chip with respect to the membrane and integrally held on a central portion of the membrane.

REFERENCES:
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patent: 4129042 (1978-12-01), Rosvold
patent: 6316840 (2001-11-01), Otani
patent: 7640807 (2010-01-01), Tamura et al.
patent: 2005/0095814 (2005-05-01), Zhu et al.
patent: 2005/0160814 (2005-07-01), Vaganov et al.
patent: 2006/0081047 (2006-04-01), Saeki
patent: 2005-161516 (2005-06-01), None
patent: 2005-351716 (2005-12-01), None
patent: WO2006/009194 (2006-01-01), None

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