Acceleration sensor

Details Acceleration sensor Acceleration sensor

2005-09-08

2009-12-15

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S509000, C073S510000, C073S514380

Reexamination Certificate

active

07631559

ABSTRACT:
An acceleration sensor includes a base having an XY-substrate surface which is parallel to an XY plane, a beam portion having a frame shape which is arranged in a floating state above the XY-substrate surface of the base, a beam-supporting fixed portion which supports the beam on the base via supporting units like a beam supported by its both ends, weight portions7which are arranged so as to float above the XY-substrate surface of the base, and connecting portions which support the weight portions7to the beam portion in a cantilever manner. The weight portions are displaceable in the X-axis direction, the Y-axis direction, and the Z-axis direction by the bending deformation of the frame-shaped beam portion. The beam portion is provided with an X-axis direction acceleration detecting portion, a Y-axis direction acceleration detecting portion, and a Z-axis direction acceleration detecting portion.

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Official communication issued in counterpart European Application No. 06711761.4, mailed on Apr. 1, 2009.
Official communication issued in the counterpart Chinese Application No. 095110831, mailed on Mar. 29, 2006.

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