Acceleration sensor

Details Acceleration sensor Acceleration sensor

2008-12-01

2009-08-18

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S509000, C073S510000, C073S514380

Reexamination Certificate

active

07574914

ABSTRACT:
An acceleration sensor includes a frame-shaped beam portion disposed above an XY substrate surface of a base in a floating state and a beam-portion supporting/fixing unit arranged to attach the beam portion to the base with support portions so as to be supported on two sides. The acceleration sensor also includes weight portions disposed above the XY substrate surface of the base in a floating state and connecting portions for attaching the weight portions to the beam portion in a cantilever state. The weight portions are movable in three axial directions including an X-axis direction, a Y-axis direction, and a Z-axis direction when the beam portion is deflected. The beam portion is provided with an X-axis-direction acceleration detection unit arranged to detect an acceleration in the X-axis direction, a Y-axis-direction acceleration detection unit arranged to detect an acceleration in the Y-axis direction, and a Z-axis-direction acceleration detection unit arranged to detect an acceleration in the Z-axis direction. The Z-axis-direction acceleration detection unit is disposed near proximal ends of Y-axis-direction extending portions of the beam portion, and the Y-axis-direction acceleration detection unit is disposed near distal ends of the Y-axis-direction extending portions.

REFERENCES:
patent: 4631834 (1986-12-01), Hayashi et al.
patent: 4675874 (1987-06-01), POhler et al.
patent: 6848320 (2005-02-01), Miyajima et al.
patent: 7331230 (2008-02-01), Takeyari et al.
patent: 7389691 (2008-06-01), Kai
patent: 2004/0012062 (2004-01-01), Miyajima et al.
patent: 2005/0279166 (2005-12-01), Shizuno
patent: 2006/0130577 (2006-06-01), Kai
patent: 2006/0173257 (2006-08-01), Nagai et al.
patent: 2006/0217603 (2006-09-01), Nagai et al.
patent: 2007/0089514 (2007-04-01), Takeyari et al.
patent: 06-130083 (1994-05-01), None
patent: 06-163937 (1994-06-01), None
patent: 09-269335 (1997-10-01), None
patent: 11-337571 (1999-12-01), None
patent: 2002-296293 (2002-10-01), None
patent: 2007-43017 (2007-02-01), None
Official Communication issued in International Patent Application No. PCT/JP2007/054201, mailed on Apr. 3, 2007.

Affiliated with

Also associated with

Rating

Acceleration sensor does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Acceleration sensor, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Acceleration sensor will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4068488