Acceleration sensor

Details Acceleration sensor Acceleration sensor

2008-04-08

2008-04-08

Williams, Hezron (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514290

Reexamination Certificate

active

10540239

ABSTRACT:
An acceleration sensor in which a difference in resonance characteristics between two resonators can be easily adjusted even when casing components are already attached to an acceleration-sensor element includes a bimorph acceleration-sensor element having first and second resonators attached to opposite sides of a base plate with respect to a direction in which acceleration is applied. One longitudinal end or both longitudinal ends of the acceleration-sensor element is/are fixed such that the first and second resonators bend in the same direction in response to the acceleration. Changes in frequency or changes in impedance in the first and second resonators caused by the bending of the acceleration-sensor element are differentially detected in order to detect the acceleration. Opposite sides of the acceleration-sensor element with respect to the application direction of acceleration are respectively covered with a pair of casing components. Electrodes disposed on the main surfaces of the respective first and second resonators face one of opposite open planes defined by a combination of the acceleration-sensor element and the casing components with respect to a direction perpendicular to the application direction of acceleration. Accordingly, a trimming process for the electrodes can be readily performed.

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