Acceleration sensor

Details Acceleration sensor Acceleration sensor

2007-10-16

2007-10-16

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C338S002000

Reexamination Certificate

active

11254822

ABSTRACT:
The piezo-resistance type triaxial acceleration sensor includes a frame section, a mass section disposed in the frame section, beam elements which flexibly support the mass section, and piezo-resistors for the X, Y and Z axes formed on the beam elements. The length of the Z-axis piezo-resistors is longer than the length of the X-axis piezo-resistors and the Y-axis piezo-resistors, so as to decrease the sensitivity.

REFERENCES:
patent: 6763719 (2004-07-01), Hatano et al.
patent: 2003-279592 (2003-10-01), None

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