Measuring and testing – Speed – velocity – or acceleration – Structural installation or mounting means
Reexamination Certificate
2006-01-24
2006-01-24
Chapman, John E. (Department: 2856)
Measuring and testing
Speed, velocity, or acceleration
Structural installation or mounting means
C073S514320, C073S514010
Reexamination Certificate
active
06988407
ABSTRACT:
An acceleration sensor includes an acceleration sensor element and a frame portion surrounding the element. The sensor element and the frame portion are located on a major surface of a substrate. An intermediate layer is formed on the frame portion. A cap portion is bonded to the intermediate layer, thereby sealing-off the acceleration sensor element. Grooves in the form of a frame are provided in the frame portion and the intermediate layer, respectively, and located at positions generally identical to each other with regard to the major surface direction of the substrate.
REFERENCES:
patent: 6441450 (2002-08-01), Yamaguchi et al.
patent: 6892577 (2005-05-01), Nagahara
patent: 2000-187040 (2000-07-01), None
patent: 2001-337103 (2001-12-01), None
Nakamura Kunihiro
Yamaguchi Yasuo
Chapman John E.
Mitsubishi Denki & Kabushiki Kaisha
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