Acceleration sensor

Measuring and testing – Speed – velocity – or acceleration – Structural installation or mounting means

Reexamination Certificate

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Details

C073S514320, C073S514010

Reexamination Certificate

active

06988407

ABSTRACT:
An acceleration sensor includes an acceleration sensor element and a frame portion surrounding the element. The sensor element and the frame portion are located on a major surface of a substrate. An intermediate layer is formed on the frame portion. A cap portion is bonded to the intermediate layer, thereby sealing-off the acceleration sensor element. Grooves in the form of a frame are provided in the frame portion and the intermediate layer, respectively, and located at positions generally identical to each other with regard to the major surface direction of the substrate.

REFERENCES:
patent: 6441450 (2002-08-01), Yamaguchi et al.
patent: 6892577 (2005-05-01), Nagahara
patent: 2000-187040 (2000-07-01), None
patent: 2001-337103 (2001-12-01), None

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