Acceleration sensing module with a combined self-test and ground

Details Acceleration sensing module with a combined self-test and ground Acceleration sensing module with a combined self-test and ground

1996-08-14

1998-03-24

Noland, Thomas P.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73 138, 7351436, G01P 2100, G01P 15125

Patent

active

057315205

ABSTRACT:
A micro-machined accelerometer includes a moveable metal plate, mounted upon a semiconductor substrate. The moveable metal plate includes an aperture which contains a pedestal and at least one torsion bar for connecting the pedestal to the moveable metal plate. Measurement electrodes formed on the semiconductor substrate combine with the metal plate to form measurement capacitors A combined self-test/common electrode provides a dual function of a common electrode during operation of the accelerometer and a testing electrode during a self-test procedure.

REFERENCES:
patent: 4736629 (1988-04-01), Cole
patent: 5220835 (1993-06-01), Stephan
patent: 5404749 (1995-04-01), Spangler
patent: 5410915 (1995-05-01), Yamamuto
patent: 5429736 (1995-07-01), Shimada et al.
patent: 5433101 (1995-07-01), Spangler et al.
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patent: 5465604 (1995-11-01), Sherman
patent: 5492020 (1996-02-01), Okada
patent: 5561248 (1996-10-01), Negoro
patent: 5610335 (1997-03-01), Shaw et al.
Patent Abstracts of Europe"Electrostatic pendulum accelerometer e.g. for vehicle airbag actuation -has test electrode on side of silicon opposite to main electrode and applies test voltage between both electrodes" abstract of French patent 2694403 dated Feb. 4, 1994 by Levy Michel et al.

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