Acceleration sensing device

Details Acceleration sensing device Acceleration sensing device

2007-09-11

2007-09-11

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C073S514010, C073S514380

Reexamination Certificate

active

11181799

ABSTRACT:
An acceleration sensing device includes a movable sensing member, a frame member and a supporting member. The supporting member is coupled between the movable sensing member and the frame member so as to support the movable sensing member. The acceleration sensing device further includes a covering member disposed above the movable sensing member, with a gap between the covering member and the movable sensing member. The acceleration sensing device still further includes internal electrodes, interconnection films, external electrodes and a resin film. The internal electrodes are arranged around the covering member. The interconnection films are disposed on the frame member so as to be coupled to the internal electrodes. The external electrodes are disposed on the interconnection films. The resin film is disposed on the frame member so as to seal the covering member. Also, there is provided a manufacturing method of the acceleration sensing device.

REFERENCES:
patent: 4891984 (1990-01-01), Fujii et al.
patent: 6263735 (2001-07-01), Nakatani et al.
patent: 6925875 (2005-08-01), Silverbrook
patent: 11-135804 (1999-05-01), None

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