Acceleration overload protection mechanism for sensor devices

Details Acceleration overload protection mechanism for sensor devices Acceleration overload protection mechanism for sensor devices

1992-01-21

1994-01-04

Williams, Hezron E.

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

73526, G01P 1502

Patent

active

052750485

ABSTRACT:
An acceleration overload protection mechanism for use with a sensor unit. The sensor unit is generally defined by a sensor element or elements (i.e., proof mass, flexures, etc.) that are movable in relation to a sensor frame. The overload protection mechanism includes at least one arresting plate. The arresting plate includes a plate frame and an arresting element that are elastically coupled to one another to permit relative movement therebetween. The plate frame of the overload protection mechanism is placed in fixed alignment with the sensor frame to place the arresting element in spaced relation with the sensor element of the sensor unit. The arresting element and sensor element may move relative to one another to allow the arresting element to move to a position proximate the sensor element to limit the range of motion of the sensor element when the sensor unit is subject to an acceleration overload. Projections extend between the arresting element and sensor unit to engage corresponding channels thereby protecting the sensor unit from damage due to cross-axis accelerations.

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Mayer et al., "Fabrication of Non-Underetched Convex Corners in Anisotropic Etching of (100)-Silicon in Aqueous KOH with Respect to Novel Micromechanic Elements", J. Electrochem. Soc., vol. 137, No. 12, Dec. 1990.

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