Acceleration insensitive piezo-microresonator

Details Acceleration insensitive piezo-microresonator Acceleration insensitive piezo-microresonator

2006-12-26

2006-12-26

Schuberg, Darren (Department: 2834)

Electrical generator or motor structure

Non-dynamoelectric

Piezoelectric elements and devices

C310S324000, C310S320000, C310S340000, C310S347000

Reexamination Certificate

active

07154212

ABSTRACT:
An acceleration insensitive piezo-microresonator provides substantially reduced acceleration sensitivity with a plano—plano piezo-microresonator, upper gap and lower gap embedded in a rigid structural supporting member holding major surfaces of the piezo-microresonator firm and steady. The piezo-microresonator has neither electrodes on its surfaces nor contacts with any electrodes. Electrodes are doped regions incorporated into the support member. The upper and lower gaps are adjacent to the major surfaces of the piezo-microresonator, permitting it to vibrate freely. The support member surrounds and supports the plano—plano piezo-microresonator plate, upper gap and lower gap, maintaining a constant upper gap height and lower gap height. The electrodes provide a thickness-directed electrical field exciting the piezo-microresonator. A method of desensitizing a resonant frequency of a piezo-microresonator to acceleration stresses is also provided.

REFERENCES:
patent: 5589724 (1996-12-01), Satoh et al.
patent: 6163101 (2000-12-01), Yoshida et al.
patent: 6969942 (2005-11-01), Takeshima et al.
patent: 6972511 (2005-12-01), Akane et al.

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